发明名称 |
METHOD FOR WET CHEMICAL ETCHING |
摘要 |
<p>In order to carry out a wet chemical etching for removing a protection (9) made of a magnetic material on the surface of an integrated electronic component (5), the invention comprises dipping the component (1) in an etching solution (2) and accelerating (4, 11) the chemical etching. In order to improve the etching and control the etching time, the electronic component in the solution is moved (13) by subjecting the same to the action of a rotating magnetic field (11). The rotation stops by itself as soon as the protection is dissolved.</p> |
申请公布号 |
WO2009118129(A1) |
申请公布日期 |
2009.10.01 |
申请号 |
WO2009EP02058 |
申请日期 |
2009.03.20 |
申请人 |
EUROPEAN AERONAUTIC DEFENCE AND SPACE COMPANY EADS FRANCE;SCANFF, ESTELLE;FOUCHER, BRUNO;LOMBAERT-VALOT, ISABELLE |
发明人 |
SCANFF, ESTELLE;FOUCHER, BRUNO;LOMBAERT-VALOT, ISABELLE |
分类号 |
H01L21/3213;C23F1/28;H01L43/12 |
主分类号 |
H01L21/3213 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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