| 摘要 |
PURPOSE: An electrostatic chuck and manufacturing method thereof are provided to prevent corrosion or leak, from the metal layer or the metal layer. CONSTITUTION: The electrostatic chuck(30) is the laminating structure including the metal layer inserted between the insulator layers. The electrostatic chuck is covered with the insulating property sprayed film. The sprayed film covers the metal layer which exposes to the inner side of the concave part. The sprayed film is coated not to be protruded from the concave part. The metal layer is the conductive layer or the cracking layer. The cross-sectional shape of the concave part is one among the funnel shape, the envelope shape and the dish-shaped.
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