COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP
摘要
A combined pumping system (10) comprises a getter pump (12) and an ion pump (13). The getter and ion pumps (12, 13) are mounted on a same flange (11) and are arranged on the same side of said flange (11) at two different points thereof.
申请公布号
WO2009118398(A1)
申请公布日期
2009.10.01
申请号
WO2009EP53634
申请日期
2009.03.26
申请人
SAES GETTERS S.P.A.;FERRIS, MICHAEL LAURENCE;CONTE, ANDREA
