发明名称 EXPOSING APPARATUS AND EXPOSING SYSTEM USING THE SAME
摘要 <p>PURPOSE: An exposure apparatus and an exposure system using the same are provided to improve a problem of liquid crystal molecules by being applied to a liquid crystal display panel. CONSTITUTION: An exposure apparatus(10) includes a stage(100) and at least one light source(101). The stage includes a bottom plate and a top plate. The bottom plate includes at least one heating piece. The top plate is positioned on the bottom plate, is coupled with the bottom plate, and includes at least one active region, at least one dummy region, and a plurality of first suction structures. At least one dummy region surrounds the active region. The first suction structures are positioned inside the dummy region. At least one light source is positioned on the stage.</p>
申请公布号 KR20090103672(A) 申请公布日期 2009.10.01
申请号 KR20080094277 申请日期 2008.09.25
申请人 发明人
分类号 H01L21/027;G02F1/13;G03F7/20 主分类号 H01L21/027
代理机构 代理人
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