发明名称 Polycrystalline silicon manufacturing apparatus
摘要 <p>A polycrystalline silicon manufacturing apparatus is provided which supplies raw gas to the inside of a reaction furnace and supplies a current from an electrode to a silicon seed rod in a state where the vertically extending silicon seed rod is uprightly stood on each of the plural electrodes disposed in a bottom plate portion of the reaction furnace so as to heat the silicon seed rod and thus to deposit polycrystalline silicon on a surface of the silicon seed rod by means of the reaction of the raw gas.</p>
申请公布号 EP2105408(A1) 申请公布日期 2009.09.30
申请号 EP20090155901 申请日期 2009.03.23
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 ENDOH, TOSHIHIDE;TEBAKARI, MASAYUKI;ISHII, TOSHIYUKI;SAKAGUCHI, MASAAKI
分类号 C01B33/035 主分类号 C01B33/035
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