发明名称 SYSTEM AND METHOD FOR CARBONATION OF DEIONIZED WATER
摘要 <p>Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.</p>
申请公布号 EP2104648(A2) 申请公布日期 2009.09.30
申请号 EP20070854132 申请日期 2007.10.17
申请人 MKS INSTRUMENTS, INC. 发明人 SEIWERT, JOHANNES;BRAMMER, ULRICH;GOTTSCHALK, CHRISTIANE;LOHR, JOACHIM
分类号 C02F1/68 主分类号 C02F1/68
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