| 摘要 |
PURPOSE: A plasma generator is provided to facilitate plasma generation at low power consumption by enabling a dielectric to focus an electric field of an electromagnetic wave. CONSTITUTION: A plasma generator includes a waveguide(2) and a dielectric. An oscillator supplies an electromagnetic wave, and the waveguide transmits the electromagnetic wave projected from the oscillator. The dielectric is inserted into the inside of the waveguide to focus the electric field to the other side of the waveguide. The dielectric is installed at an inlet to which the electromagnetic wave is projected. |
