| 摘要 |
PURPOSE: A method for inspecting a mark partition is provided to inspect a defect of the mark accurately even though the defect is very small. CONSTITUTION: A reference image for determining the defect of a mark is obtained(S100). An inspection image is obtained(S110). The correlation of a character unit about the reference image and the inspection image is produced(S120). The correlation and the first threshold value are compared(S130). If the correlation is larger than the first threshold value, the corresponding character is divided to the predetermined number of the regions. The correlation between the reference image and the inspection image are produced based on the divided regions(S150). The defect is determined by comparing the second threshold value with the difference between the maximum and the minimum of the correlation(S160).
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