Method of analyzing minute amounts of Pd, Rh and Ru, and high-frequency plasma mass spectroscope used for same

摘要

The invention provides a method for analyzing minute amounts of Pd, Rh and Ru with high accuracy by a high-frequency plasma mass spectroscope. The method comprises (1) a step of pretreating a sample by an alkali fusion method using a sodium compound; and (2) a step of analyzing the pretreated sample using a high-frequency plasma mass spectroscope; wherein, in step (2), the distance between a sampling cone and a skimmer cone is adjusted such that the concentration of 40Ar65Cu which interferes with Pd, the concentrations of 40Ar63Cu and 40Ar40Ar23Na which interfere with Rh, and the concentrations of 38Ar63Cu and 40Ar38Ar23Na which interfere with Ru are all equal to or less than 0.05 ppb.