| 摘要 |
PURPOSE: A probe card, a space transformer therefor and a method of manufacturing a space transformer are provided to largely reduce a defective rate and improve a manufacturing yield. CONSTITUTION: A space transformer(100) for a probe card laminates and sinters a plurality of ceramic sheets(21). The space transformer for a probe card includes reinforcing via sets(10). The reinforcing via sets include vias and connection pads. The vias are adjacent each other. The vias penetrate a ceramic sheet. The connection pad is arranged in one side of the ceramic sheet. The connection pad electrically connects the adjacent vias.
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