发明名称 Environmental cell for a particle-optical apparatus
摘要 The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.
申请公布号 EP2105944(A1) 申请公布日期 2009.09.30
申请号 EP20080153482 申请日期 2008.03.28
申请人 FEI COMPANY 发明人 BUIJSSE, BART
分类号 H01J37/02;G01Q30/02;G01Q30/16;H01J37/16;H01J37/28;H01J37/305 主分类号 H01J37/02
代理机构 代理人
主权项
地址