| 摘要 |
An accelerometer (58) that has a cross coupling coefficient due to pendulum droop of the proof mass (60) that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator nonlinearity. The accelerometer includes a proof mass (60), a housing having at least two opposing interior walls (68), and one or more flexures (62) for flexibly connecting the proof mass (60) at a first end to a first one of the opposing walls of the housing. A first resonator (64-1) is connected to a first surface of the proof mass (60) at an end of the proof mass opposite the first end and to the housing wall that is not attached to the flexure. A second resonator (64-2) is connected to a second surface of the proof mass (60) and the housing wall that receives the first resonator. The second surface is on an opposite side of the proof mass as the first surface.
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