Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film,申请号ZA20070003117-传众专利搜索

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发明名称	Method and apparatus for growing a group (III) metal nitride film and a group (III) metal nitride film
摘要
申请公布号	ZA200703117(B)	申请公布日期	2009.09.30
申请号	ZA20070003117	申请日期	2007.04.16
申请人	GALLIUM ENTERPRISES PTY LTD	发明人	BUTCHER, KENNETH SCOTT ALEXANDER;WINTREBERT EP FOUQUET, MARIE-PIERRE FRANCOISE;CHEN, PATRICK PO-TSANG;TEN HAVE, JOHN LEO PAUL;JOHNSON, DAVID IAN
分类号	C23C;H01L	主分类号	C23C
代理机构		代理人
主权项
地址

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