| 摘要 |
<p>Crystal growing equipment i.e. semiconductor crystal growing equipment, comprises a coil array including at least 3 coils made from a hollow cylindrical body (1) of an electrically conductive material, which forms, by a slit (2) that winds many times, a single layered spiral-shaped current path, which is subdivided in segments, each of which forms a coil by the contact points (3-6) that can be connected with the power supply. Crystal growing apparatus, preferably semiconductor crystal growing equipment comprises a heatable crucible for a melt; and a coil array arranged coaxially with respect to the crucible, for generating a magnetic field in the melt, in which the coil array includes at least three coils, which are arranged axially one above the other, and through each alternating current flows, where the alternating current in the coil is phase shifted with the alternating current in the neighboring coil. The coils are made from a hollow cylindrical body of an electrically conductive material, which forms, by a slit that winds many times, a single layered spiral-shaped current path, which is subdivided in segments, each of which forms a coil by the contact points that can be connected with the power supply.</p> |
