| 摘要 |
A method for manufacturing a piezoelectric actuator includes the steps of measuring a thickness of a vibration plate and determining a thickness of a piezoelectric layer based on an amount of deviation in the measured thickness of the vibration plate from a preset reference thickness of the vibration plate. Then, a piezoelectric layer of the determined thickness is formed on a side of the vibration plate which is opposite to a pressure chamber. This makes it easy to correct the thickness of the vibration plate with the thickness of the piezoelectric layer. It is easy to mass-produce piezoelectric actuators having constant and desired characteristics.
|
