| 摘要 |
PURPOSE: A chlorosilane purifying device and a manufacturing method of chlorosilane are provided to restrict corrosion or color degradation of a pipe in a distillation process after removing aluminum chloride in the gas. CONSTITUTION: A chlorosilane purifying device includes a container(1) filling sodium chloride, a heating unit(17), a gas supply pipe(24), and a gas collecting pipe(26). The heating unit heats a sodium chloride layer. The gas supply pipe supplies the gas containing chlorosilane generated by reaction of metal silicon and hydrochloride. The gas collecting pipe discharges the gas which passes through the sodium chloride layer.
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