| 发明名称 |
DEVELOPING APPARATUS AND DEVELOPING METHOD |
| 摘要 |
<p>PURPOSE: A developing apparatus and a developing method thereof are provided to prevent a development failure. CONSTITUTION: A developing apparatus includes a rotation holding support device(10) and a developer supply unit(21). A rotation holding support device supports a substrate horizontally. The rotation holding support device rotates the substrate around an axis vertical to the substrate. The developer supply unit continuously supplies the developer from the center to the edge of the substrate while the substrate is rotated in the rotation holding support device.</p> |
| 申请公布号 |
KR20090101816(A) |
申请公布日期 |
2009.09.29 |
| 申请号 |
KR20090007333 |
申请日期 |
2009.01.30 |
| 申请人 |
SOKUDO CO., LTD. |
发明人 |
HISAI AKIHIRO;HARUMOTO MASAHIKO;SUGIYAMA MINORU;KURODA TAKUYA;IMAMURA MASANORI |
| 分类号 |
H01L21/027;G03F7/30 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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