发明名称 Fabrication of like-polarity insulated-gate field-effect transistors having multiple vertical body dopant concentration maxima and different halo pocket characteristics
摘要 Fabrication of two differently configured like-polarity insulated-gate field-effect transistors (40 or 42 and 240 or 242) entails introducing multiple body-material semiconductor dopants of the same conductivity type into a semiconductor body. Gate electrodes (74 or 94) are defined such that each body-material dopant reaches a maximum concentration below the channel surface depletion regions, below all gate-electrode material overlying the channel zones (64 or 84), and at a different depth than each other body-material dopant. The transistors are provided with source/drain zones (60 or 80) of opposite conductivity type to, and with halo pocket portions of the same conductivity type as, the body-material dopants. One pocket portion (100/102 or 104) extends along both source/drain zones of one of the transistors. Another pocket portion (244 or 246) extends largely along only one of the source/drain zones of the other transistor so that it is asymmetrical.
申请公布号 US7595244(B1) 申请公布日期 2009.09.29
申请号 US20070975042 申请日期 2007.10.16
申请人 NATIONAL SEMICONDUCTOR CORPORATION 发明人 BULUCEA CONSTANTIN;WANG FU-CHENG;CHAPARALA PRASAD
分类号 H01L21/336 主分类号 H01L21/336
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