发明名称 Web coating apparatus with a vacuum chamber and a coating cylinder
摘要 A web coating apparatus with a vacuum chamber (1) has between a rear wall (18) and at least one removable closing plate (22), housing member (20) with a planar cover (10), and at least one guide roll (12, 13, 14, 15) and a coating cylinder (9) with an axle (A) and at least one coating source (39a, 39b, 39c) are arranged in the vacuum chamber (1). To reduce structural height and width and to achieve an easily viewable and controllable web path while avoiding particle formation in the reach of the coating cylinder (9), provision is made pursuant to the invention that the ends of the at least one guide roll (12, 13, 14, 15) and of the coating cylinder are affixed by supporting elements (16, 17 and 19) with bearings to the cover (10) and that the cavity in the vacuum chamber (1) under the coating cylinder (9) is kept free of supporting elements. At the same time it is possible to mount the at least one guide roll (12, 13, 14, 15) and the coating cylinder (9) with their ends remote from the closing plate (22) on the rear wall (18), or, alternatively, to journal the at least one guide roll (12, 13, 14, 15) and the coating cylinder (9) on supporting elements in front of the rear wall (18) and hold it onto the cover (10).
申请公布号 US7594970(B2) 申请公布日期 2009.09.29
申请号 US20040784477 申请日期 2004.02.23
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 HEIN STEFAN;SKUK PETER
分类号 C23C16/00;C23C14/56;C23C16/54 主分类号 C23C16/00
代理机构 代理人
主权项
地址