Device for introducing fluid in treatment chamber by chemical vapor deposition, includes fluid injector comprising body in one part and movable piece forming seal in other part, where body and/or seal has surface made of synthesis material

摘要

The device comprises a fluid injector comprising a body (17) in one part and a movable piece forming a seal in other part. The body and/or the seal have a surface made of synthesis material in contact with a surface of other element. The synthesis material has a thickness of greater than 50 mu m, and comprises a polymer, a mineral load and ceramic. The seal is trained by an actuator. The ceramic has a Vickers hardness of greater than 1100 and a dynamic friction coefficient of lower than 0.16.