| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a contact probe for forming by a simple method, a contact probe having a bent part having desired shape and size. SOLUTION: This method includes: an electrode film forming process for forming an electrode domain 61 adjacent to an insulating domain 41 on an insulating substrate by forming an electrode film 6 comprising a first conductive material on the insulating substrate; a sacrificial layer forming process for electroplating the first conductive material on the electrode film 6, and forming a sacrificial layer 8 having a curved surface rising from the insulating domain 41 and curved toward the electrode domain 61; a probe forming process for plating electrically a second conductive material on the sacrificial layer 8, and forming the contact probe 1; and a sacrificial layer removal process for removing the sacrificial layer 8. COPYRIGHT: (C)2009,JPO&INPIT
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