| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting device for inspecting minute objects for scale anomalies, shape anomalies such as fracture or dents, foreign matter adhesion, or the like, and determining non-defective and defective in a short time by using a simple system structure. SOLUTION: This defective shape determining/inspecting device of minute objects is characterized by being equipped with: an illumination light applying means for applying illumination light from an oblique direction to inspected objects which are cyclically arranged minute objects, with blue, green, and red LEDs used as light sources; an imaging means for imaging reflected light from the inspected objects; an image storage means for therein storing images taken by the imaging means; an image composition means for composing one image out of three images stored in the storage means; and a determining means for performing image processing on a composed image to determine whether the inspected objects have defective shapes. COPYRIGHT: (C)2009,JPO&INPIT
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