发明名称 IMPROVED PERFORMANCE OPTICALLY COATED SEMICONDUCTOR DEVICES AND RELATED METHODS OF MANUFACTURE
摘要 The present application disclosed various embodiments of improved performance optically coated semiconductor devices and various methods for the manufacture thereof and includes depositing a first layer of a low density, low index of refraction material on a surface of a semiconductor device, depositing a multi-layer optical coating comprising alternating layers of low density, low index of refraction materials and high density, high index of refraction materials on the coated surface of the semiconductor device, selectively ablating a portion of the alternating multi-layer optical coating to expose at least a portion of the low density first layer, and selectively ablating a portion of the first layer of low density material to expose at least a portion of the semiconductor device.
申请公布号 WO2009075880(A3) 申请公布日期 2009.09.24
申请号 WO2008US13653 申请日期 2008.12.11
申请人 NEWPORT CORPORATION;KNAPP, JAMIE 发明人 KNAPP, JAMIE
分类号 H01L33/44 主分类号 H01L33/44
代理机构 代理人
主权项
地址