发明名称 |
SEMICONDUCTOR DEVICE INCLUDING A PLURALITY OF DIFFERENT FUNCTIONAL ELEMENTS AND METHOD OF MANUFACTURING THE SAME |
摘要 |
At least first and second Si1-xGex (0<=x<=1) layers are formed on an insulating film. At least first and second material layers are formed correspondingly to the at least first and second Si1-xGex (0<=x<=1) layers. A lattice constant of the first Si1-xGex (0<=x<=1) layer is matched with a lattice constant of the first material layer. A lattice constant of the second Si1-xGex (0<=x<=1) layer is matched with a lattice constant of the second material layer. |
申请公布号 |
US2009236587(A1) |
申请公布日期 |
2009.09.24 |
申请号 |
US20090405505 |
申请日期 |
2009.03.17 |
申请人 |
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发明人 |
MIYAO MASANOBU;NAKASHIMA HIROSHI;SADOH TAIZOH;MIZUSHIMA ICHIRO;YOSHIMARU MASAKI |
分类号 |
H01L29/15;H01L21/20 |
主分类号 |
H01L29/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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