ANALYZING METHOD OF THREE-DIMENSIONAL EMISSION CENTER DISTRIBUTION OF ELECTROLUMINESCENCE ELEMENT USING SPECTRUM IMAGING SPECTROSCOPIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an analyzing method of the three-dimensional emission center distribution of an electroluminescence element capable of analyzing the depth direction distribution and in-plane distribution of the emission center of the electroluminescence element in a non-destructive manner. SOLUTION: The analyzing method of the three-dimensional emission center distribution of the electroluminescence element includes a step of performing the mapping measurement of the electroluminescence spectrum in the element emission plane of the electroluminescence element 1 being an analyzing target using a spectrum imaging spectroscopic apparatus to form an electroluminescence spectrum map, and a step of predicting a single emission region in the depth direction of the electroluminescence element to set a distribution function and performing fitting using a calculation method considering optical multiple interference so that the parameter constituting the distribution function satisfies the measuring value of the electroluminescence spectrum to estimate the optimum element depth direction distribution and element in-plane distribution of the emission center. COPYRIGHT: (C)2009,JPO&INPIT