| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for magnetic structure analysis for sorting an element and an atom layer in the uppermost surface 2-3 atom layer. SOLUTION: The intensity of the scattered ions from a sample is measured by the spin of an incident ion species and the surface magnetic structure of the sample is analyzed on the basis of the measuring data. The magnetic structure analyzer is composed of a spin polarized ion producing part for producing spin polarized ions, a spin polarized ion beam line for throwing the spin polarized ions from the spin polarized ion producing part on the surface of the sample by desired energy, a vacuum tank for holding the sample and the measuring instrument positioned in the vacuum tank to measure the spin polarized ions scattered by the irradiation of the sample. COPYRIGHT: (C)2009,JPO&INPIT
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