| 发明名称 |
LAYER STACK INCLUDING A TUNGSTEN LAYER |
| 摘要 |
A method for producing a layer stack includes providing a tungsten layer, depositing an oxidation barrier layer that immunizes the tungsten layer against oxidation on top of the tungsten layer, and depositing a cap layer on top of the oxidation barrier layer. An integrated circuit is also described.
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| 申请公布号 |
US2009236682(A1) |
申请公布日期 |
2009.09.24 |
| 申请号 |
US20080052004 |
申请日期 |
2008.03.20 |
| 申请人 |
BOUBEKEUR HOCINE;KNOEFLER ROMAN;SPERLICH HANS-PETER;FITZ CLEMENS;MINTON PATRICK |
发明人 |
BOUBEKEUR HOCINE;KNOEFLER ROMAN;SPERLICH HANS-PETER;FITZ CLEMENS;MINTON PATRICK |
| 分类号 |
H01L21/283;H01L29/49 |
主分类号 |
H01L21/283 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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