| 摘要 |
A method for manufacturing an ink jet recording head including a reservoir to which ink is supplied from outside, a pressure generating chamber leading to the reservoir, and a nozzle orifice leading to the pressure generating chamber, includes: a) forming a flow channel forming film on a first face side of a substrate having an integrated circuit; b) forming a groove in the flow channel forming film; c) filling the groove with a sacrificial film; d) forming a vibrating film on the sacrificial film and the flow channel forming film; e) forming a piezoelectric element on the vibrating film; f) forming the reservoir by etching the substrate from a second face side of the substrate to an extent where the sacrificial film is exposed; g) removing the sacrificial film through the reservoir; and h) forming the nozzle orifice in the flow channel forming film.
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