| 摘要 |
The invention relates to a cooling device for semiconductor elements. The aim of the invention is to increase the effectiveness of the corrosion proofing and to increase the service life of the cooling device by reducing the corrodibility of the cooling channels while safeguarding the reliability of the device in relation to the semiconductor element. The invention is characterized in that a cooling channel structure which is interspaced from the assembly surface for the semiconductor element has cooling ribs that are integrally bonded to the heat-conducting zone and that mainly contain tantalum and/or niobium in at least one core zone. |
