| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser power measuring device which is small, is easy to manufacture, eliminates devices and paths for cooling, and ensures high repetitive measurement accuracy in a short time. SOLUTION: The laser power measuring device 10 includes a laser power measuring device main unit 11 and a signal path 12. The laser power measuring device main unit 11 is provided with a plurality of holes 15, or through parts, which are on the outer peripheral part of a light receiving part 14 for a laser beam 13 and are in parallel with the optical axis of the laser beam 13. The temperature of the laser power measuring device main unit 11 is measured by a temperature sensor provided within the laser power measuring device main unit 11 and is extracted through the signal path 12. COPYRIGHT: (C)2009,JPO&INPIT |
