REDUCED-PRESSURE DRYING UNIT AND COATING FILM FORMING METHOD,申请号KR20020056797-传众专利搜索

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发明名称	REDUCED-PRESSURE DRYING UNIT AND COATING FILM FORMING METHOD
摘要
申请公布号	KR100918580(B1)	申请公布日期	2009.09.24
申请号	KR20020056797	申请日期	2002.09.18
申请人		发明人
分类号	H01L21/027;B05D3/04;H01L21/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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