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发明名称
Herstellungsverfahren für einen Graben-Transistor und entsprechender Graben-Transistor
摘要
申请公布号
DE102005047058(B4)
申请公布日期
2009.09.24
申请号
DE200510047058
申请日期
2005.09.30
申请人
QIMONDA AG
发明人
SCHLOESSER, TILL;WEIS, ROLF;MOLL, HANS-PETER;POPP, MARTIN;STRASSER, MARC;LUYKEN, HANNES
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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