| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminated ceramic element, which is capable of suppressing reduction of Pb by removing remaining carbon which is produced from a binder component included in a piezoelectric ceramic layer during calcination, to the outside of a system. <P>SOLUTION: In the method of manufacturing the laminated ceramic element obtained by alternately laminating a PZT-based piezoelectric ceramic layer and a Cu-based electrode layer, an element precursor 10x having an uncalcinated PZT-based piezoelectric ceramic layer 2x and an uncalcinated Cu-based electrode layer laminated is installed on a line L connecting a gas introduction path 31 and a gas discharge path 33 in a baking furnace 30 which has the gas introduction path and the gas discharge path and contains Pb vapor, and a gas flow generated when discharging atmospheric gas introduced from the gas introduction path through the gas discharge path is brought into contact with the element precursor 10x to perform calcination. <P>COPYRIGHT: (C)2009,JPO&INPIT |
