| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of a synthetic silica glass which is capable of manufacturing a synthetic silica glass having no striae and defects in it and a manufacturing process of the synthetic silica glass using the manufacturing apparatus. SOLUTION: A burner 7 has an outer pipe 7a and an inner pipe 7b which are concentrically arranged and blow out a combustion gas, a plurality of first combustion-supporting gas nozzles 7c which are arranged between the outer pipe 7a and the inner pipe 7b and blow out a combustion-supporting gas, a source nozzle 7e which is arranged in the central part of the inner pipe 7b and blows out a material gas, and a plurality of second combustion-supporting gas nozzles 7f which are arranged between the inner pipe 7b and the source nozzle 7e and blows out a combustion-supporting gas. The combustion gas jetted from the inner pipe 7b and the second combustion-supporting gas jetted from the second combustion-supporting gas nozzles 7f forms a flame stream directed toward a target 4. The combustion gas jetted from the outer pipe 7a and the first combustion-supporting gas jetted from the first combustion-supporting gas nozzles 7c forms a radial flame stream directed toward the inner wall of a furnace 2. COPYRIGHT: (C)2009,JPO&INPIT
|
