| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming an insulating film capable of reducing a buildup portion of a dry-film resist at a low cost without using any press equipment. SOLUTION: By installing a thick PET film 5 of 220μm or more on a dry-film resist 4 at the time of a vacuum lamination, a buildup portion of the dry-film resist 4 can be reduced only by a usual vacuum laminating apparatus without adding any press process after the vacuum lamination. COPYRIGHT: (C)2009,JPO&INPIT
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