| 发明名称 |
HAND HAVING ROCKING MECHANISM AND SUBSTRATE DELIVERING DEVICE HAVING THE SAME |
| 摘要 |
A hand 1 is constituted by a hand base 4 serving as a base portion, a rocking hand 3 disposed to be superposed on the hand base 4 and serving to support a substrate 2, and a rocking mechanism 5 provided between the hand base 4 and the rocking hand 3 and serving to support the rocking hand 3 to be tiltable and movable in parallel with respect to the hand base 4.
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| 申请公布号 |
US2009236786(A1) |
申请公布日期 |
2009.09.24 |
| 申请号 |
US20090407826 |
申请日期 |
2009.03.20 |
| 申请人 |
KABUSHIKI KAISHA YASKAWA DENKI;EBARA CORPORATION |
发明人 |
SANEMASA HIROKI;YAMAMOTO HIDEO;TORII NAOOMI;OGAWA TAKAHIRO;KATSUOKA SEIJI;NAKAO HIDETAKA;MAKINO NATSUKI |
| 分类号 |
H01L21/677;H01L21/68 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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