发明名称 OSCILLATOR DEVICE, OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
摘要 An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam.
申请公布号 US2009235502(A1) 申请公布日期 2009.09.24
申请号 US20090481472 申请日期 2009.06.09
申请人 CANON KABUSHIKI KAISHA 发明人 KATO TAKAHISA;FURUKAWA YUKIO;AKIYAMA TAKAHIRO
分类号 H01L41/22 主分类号 H01L41/22
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