TARGET FOR LASER VAPOR DEPOSITION AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a target for laser vapor deposition which hardly generates cracks even when it is irradiated with a laser without using a backing plate and is wide in applicable composition range of an oxide superconductive sintered compact.

SOLUTION: The target for laser vapor deposition includes an oxide superconductive sintered compact. The target is characterized in that the value of the linear thermal expansion coefficient in the direction perpendicular to the use surface of the target is lager by at least 10% than the value of the linear thermal expansion coefficient in a direction parallel to the use surface of the target.

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