| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a shower plate with which a back flow of plasma is prevented, plasma excitation gases can be uniformly and stably supplied and during use, no component is dropped. <P>SOLUTION: A porous and columnar gas communicating body 11 is formed which includes gas pores communicated in a gas communicating direction. A tubular dense member 12, that covers a side surface of the gas communicating body 11 in contact therewith, is formed with a gas non-permeable material. The gas communicating body 11 is fitted into a hollow portion of the dense member 12 to form a porous piece body 13, and sintering is performed at a first temperature. A recessed part 10 is formed on a top plate 9, and a gas conduit is formed through the top plate 9 while communicating one end thereof with the recessed part 10. The porous piece body 13 is fitted into the recessed part 10 and integrally sintered at a temperature equal to or lower than the first temperature, thereby forming a shower plate 3. <P>COPYRIGHT: (C)2009,JPO&INPIT |
