发明名称 SUSPENSION-JETTING DEVICE, MANUFACTURING DEVICE OF FLAT PANEL DISPLAY, FLAT PANEL DISPLAY, MANUFACTURING DEVICE OF SOLAR CELL, AND SOLAR CELL
摘要 PROBLEM TO BE SOLVED: To execute cleaning to remove solid dirt firmly adhering to an ink-jetting head and also make cleaning without detaching an ink-jetting head from an ink-jetting device. SOLUTION: A suspension-jetting device is provided with; an ink-jetting stage 11 in which an ink is jetted onto a substrate 1 by an ink-jetting head 25 in which nozzles 30 for jetting ink downward are arranged in line; and a maintenance stage 12 which is provided with an ultrasonic wave cleaning tank 35 having a cleaning liquid tank 40, which is filled with a cleaning liquid 41 for cleaning the ink-jetting head 25, and an ultrasonic wave fixation element 52 which irradiates the cleaning liquid 41 with ultrasonic waves. By this, firmly adhering solid dirt can surely be cleaned off. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009214032(A) 申请公布日期 2009.09.24
申请号 JP20080060849 申请日期 2008.03.11
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 KATAGIRI KENJI;AKIBA YUJI
分类号 B05C11/10;B05C5/00;G02F1/1339;H01L31/04 主分类号 B05C11/10
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