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发明名称
Raster Ladungsträgerstrahlmikroskop
摘要
申请公布号
DE60139535(D1)
申请公布日期
2009.09.24
申请号
DE20016039535
申请日期
2001.08.29
申请人
HITACHI LTD.
发明人
ISHITANI, TOHRU;TODOKORO, HIDEO;SATO, MITSUGU
分类号
H01J37/09;H01J37/28
主分类号
H01J37/09
代理机构
代理人
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地址
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