| 摘要 |
<P>PROBLEM TO BE SOLVED: To form an excitation electrode (21) which is superior in electrical conductivity, has few defects and is stable for a piezoelectric vibrating piece (20). <P>SOLUTION: This piezoelectric vibration piece (20) is provided with the excitation electrode (21) on a surface of the piezoelectric piece. The excitation electrode (21) is provided with an underlayer (25) formed on a surface of the piezoelectric piece; a first gold (Au) layer (26), formed on a surface of the under layer by using a first film formation method; and a second gold layer (27) formed on a surface of the first gold layer by using a second film formation method different from the first film formation method. For example, the first film formation method is a film formation method based on a sputtering method, and the second film formation method is a film formation method based on a vacuum vapor deposition method. <P>COPYRIGHT: (C)2009,JPO&INPIT |
