| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface treatment apparatus which can suppress an impair of the apparatus by a gas used for a surface treatment and reforming. <P>SOLUTION: The surface treatment apparatus 100 includes: a diluent gas supply unit 1 supplying a diluent gas; a fluorine gas supply unit 2 supplying a fluorine gas; a mixer 5 mixing the diluent gas and the fluorine gas to produce a mixed gas; and a reactor vessel 6 contacting the mixed gas with the object to be treated, and is characterized by further comprising: an exhaust equipment 7 discharging an exhaust gas from the reactor vessel inside; a plurality of passages 19, 20, 21, and 22 provided between the reactor vessel 6 and the exhaust equipment 7 and circulating the exhaust gas; and a plurality of valves 23, 24, 25, and 26 provided on each of a plurality of passages. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
