| 摘要 |
PROBLEM TO BE SOLVED: To provide carrying technology for efficiently changing a substrate carrying speed on the way without increasing the size of a device. SOLUTION: In carrying a substrate beyond a boundary between two carrying mechanisms arranged in series, synchronous control is performed for reducing the carrying speeds of the two carrying mechanisms while matching them, in a time zone (a time T11 to a time T12) including a delivery period (a time T15 to a time T16) for delivering the substrate being moved on the boundary. A time-speed relationship in a speed reducing process is made into a S-curve to prevent a sharp change of acceleration to be applied to the substrate. The delivery period is used as a speed reducing period to actualize efficient carriage, as compared with the case where a speed reduction is completed before that or the speed reduction is started after delivering the substrate. COPYRIGHT: (C)2009,JPO&INPIT |
