发明名称 |
GATE INSULATING MATERIAL, GATE INSULATING FILM, AND ORGANIC FIELD EFFECT TRANSISTOR |
摘要 |
Disclosed is a gate insulating material having high chemical resistance and small hysteresis. A resist and an organic semiconductor coating liquid can exhibit excellent coatability to the gate insulating material. Specifically disclosed is a gate insulating material containing a polysiloxane having at least a silane compound represented by general formula (1) and an epoxy group-containing silane compound represented by general formula (2) as copolymerization components. R1 mSi(OR2)4-m (1) (In the formula, R1 represents a hydrogen, an alkyl group, a cycloalkyl group, a heterocyclic group, an aryl group, a heteroaryl group or an alkenyl group; R2 represents an alkyl group or a cycloalkyl group; and m represents an integer of 1-3.) R3 nR4 lSi(OR5)4-n-l (2) (In the formula, R3 represents an alkyl group or cycloalkyl group having one or more epoxy groups in a part of a chain; R4 represents a hydrogen, an alkyl group, a cycloalkyl group, a heterocyclic group, an aryl group, a heteroaryl group or an alkenyl group; R5 represents an alkyl group or a cycloalkyl group; l represents an integer of 0-2; n represents 1 or 2; and l + n = 3.) |
申请公布号 |
WO2009116373(A1) |
申请公布日期 |
2009.09.24 |
申请号 |
WO2009JP53628 |
申请日期 |
2009.02.27 |
申请人 |
TORAY INDUSTRIES, INC.;MURASE, SEIICHIRO;FUJIWARA, TAKENORI;JO, YUKARI;TSUKAMOTO, JUN |
发明人 |
MURASE, SEIICHIRO;FUJIWARA, TAKENORI;JO, YUKARI;TSUKAMOTO, JUN |
分类号 |
H01L21/312;C08G59/20;C08G59/68;C09D5/25;C09D183/04;H01L29/786;H01L51/05 |
主分类号 |
H01L21/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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