发明名称 PATTERN MATCHING PROCESSING SYSTEM AND PROGRAM
摘要 PROBLEM TO BE SOLVED: To recognize the lead of a narrow pitch with high precision by preparing a plurality of image data obtained by photographing different objects as a recognition pattern. SOLUTION: A pattern matching processing system 100 includes: a recognition pattern storage part 110 which stores first image data obtained by photographing at least a portion of a lead frame or a substrate as a first object and second image data obtained by photographing at least a portion of the lead frame or the substrate as a second object different from the first object as a recognition pattern, and which stores one of the first image data and the second image data as a normal recognition pattern and the other image data as a preliminary recognition pattern; and a recognition part 104 which recognizes the input image pattern by pattern matching with the normal recognition pattern stored by the recognition pattern storage part 110, and which performs, when any error is generated in the pattern matching, the pattern matching with the preliminary recognition pattern stored in the recognition pattern storage part 110. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009218525(A) 申请公布日期 2009.09.24
申请号 JP20080063572 申请日期 2008.03.13
申请人 NEC ELECTRONICS CORP 发明人 SANO TSUTOMU
分类号 H01L21/60 主分类号 H01L21/60
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