| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for controlling a blanking coil which decrease the blanking-off period and thereby decrease the total period of blanking-on/off. SOLUTION: The device for controlling a blanking coil, to be used in a charge particle beam drawing device for drawing a pattern on a drawing medium with a charged particle beam, comprises: a pair of coils L1, L2 provided for blanking; a pair of drive circuits 10, 11 applying a current to the coils; D/A converters 1, 2 provided in input sections of the drive circuits; a control CPU 4 setting digital values on the D/A converts; a differential amplification circuit for extracting the difference current in the currents applied to the pair of coils L1, L2; and an A/D converter converting the output of the differential amplification circuit into a digital value, and sends the output of the A/D converter 3 to the control CPU 4. COPYRIGHT: (C)2009,JPO&INPIT
|
