| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of driving a piezoelectric actuator to control the amount and direction of displacement of a piezoelectric film formed by an epitaxial growth method such as sputtering method or an oriented growth method, and to provide a method of driving a liquid ejection head. <P>SOLUTION: When the piezoelectric actuator having a piezoelectric element 23, having the piezoelectric film 20 formed by priority orientation to (111) by sputtering method, joined to a diaphragm 256 is driven by applying a driving signal having a plus voltage of a coercive electric field or more to an upper electrode 257B as an address electrode while using a lower electrode 257A as a ground electrode, the diaphragm 256 deforms inward in a pressure chamber 252, so that a liquid is ejected from a nozzle 251. Even when an electric field is applied in the direction opposite to a polarization direction, there is neither a decrease in amount of displacement nor inversion of the direction of displacement as compared with the case when the electric field is applied in the same direction as the polarization direction, so that the liquid is suitably ejected. <P>COPYRIGHT: (C)2009,JPO&INPIT |
