| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin-film sample for transmission electron microscopes can set a sample having not less than one observation place located at a deep region of not less than 10μm from the surface to be an appropriate thin-film sample for TEM observation by an inexpensive and simple process. SOLUTION: The manufacturing method of a thin-film sample for TEM observation includes: an extraction/fixation process of a minute sample piece 1 for extracting the minute sample piece from a sample 1 including an observation place inside at a depth of not less than 10μm from the surface for adhering to a sample stand for TEM observation; and a thinning process for machining as a thin-film sample for TEM observation by focused ion beam irradiation machining in a direction vertical to the surface of the minute sample piece. In the manufacturing method of a thin-film sample for TEM observation, before the extraction process, an oblique cutting process is inserted to cut an upper-layer section 2 at the observation place of the sample 1 to not more than 10μm from an oblique upper surface by the focused ion beam irradiation machining 7. COPYRIGHT: (C)2009,JPO&INPIT
|
