发明名称 |
Membranabdeckung und Haftmittel hierfür |
摘要 |
<p>A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A):fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto.</p> |
申请公布号 |
DE60139526(D1) |
申请公布日期 |
2009.09.24 |
申请号 |
DE2001639526 |
申请日期 |
2001.03.14 |
申请人 |
ASAHI GLASS CO. LTD. |
发明人 |
MATSUKURA, IKUO;SHIROTA, NAOKO;IRISAWA, JUN |
分类号 |
C08F116/14;C08F216/14;C08L27/12;G03F1/62;G03F1/64 |
主分类号 |
C08F116/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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